SILICON NITRIDE FOR MICROELECTRONIC APPLICATIONS



Silicon Nitride For Microelectronic Applications

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CHARACTERIZATION OF SILICON NITRIDE WAVEGUIDE. For microelectronic applications, this material has several features better than the conventional silicon dioxide when used as a gate dielectric in field-effect, The large amount of literature on the technology of thin film silicon nitride indiВ­ cates the interest of the Department of Defense, NASA and the semiconductor.

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Boron Nitride Parts. Boron Nitride parts are made by pressing hexagonal Boron Nitride Microelectronic industry; Silicon Carbide Ceramics, Silicon Nitride Presented either as a source or as a barrier to hydrogen, plasma deposited silicon nitride can impact microelectronic device performances. The objective of this paper